RF Plasma Experiment Device RFPC-550
RF Plasma Experimental Device RFPC-550
This is an introduction to the plasma experimental equipment using an RF 13.56MHz excitation plasma source handled by Arios Corporation. A flexible design that only Arios Corporation, which designs its own plasma sources, can provide. We will design and manufacture according to the specifications required by our customers. 【Features】 - Easy operation with automatic matching - Compact chamber and simple structure for easy maintenance - Equipped with interlocks for high voltage electric shock prevention against PF - Mechanisms that safely stop in case of high-frequency leakage or power outages - Option to add a load lock mechanism ● For other functions and details, please download the catalog.
- Company：アリオス
- Price：Other
